Reticle Mask Products
Reticle Mask
Product size and Accuracy specifications
| Category | High Precision (228.6mm*228.6mm) |
Medium Precision(228.6mm*228.6mm)
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| Seam size (μm) | Seam accuracy (μm) | Verticality (urad) | Total length accuracy (μm) | Position accuracy (μm) | Seam size (μm) | Seam accuracy (μm) | Verticality (urad) | Total length accuracy (μm) | Position accuracy (μm) | |
| Quartz | ≥1 | ≤0.5 | ≤0.5 | ＜0.3 | ≤0.1 | ≥3 | ≤0.5 | ≤0.5 | ≤0.5 | ≤0.2 |
| Soda Lime | ≥1 | ≤0.5 | ≤0.5 | ＜0.3 | ≤0.1 | ≥3 | ≤0.5 | ≤0.5 | ≤0.5 | ≤0.2 |
